PH515: mems & nems
Course OveRVIEW
MEMS and NEMS based sensors and actuators form an integral part of most modern day technologies from casual communication devices, point of care healthcare units to electronic warfare systems and is worth over INR 5 trillion of global business as of March 2014. Despite lot of development in recent past, there are key fundamental issues related to: (i) the origin of noise and noise characteristics, (ii) ultra-low and ultra-high frequesncy response, (iii) nonlinear dynamical effects, (iii) quantum mechanical effects, etc., which require interdisciplinary intervention. Tremendous application potential of MEMS and NEMS based systems make them a hotbed for cutting edge research and innovation.
The goal of this course is to equip the students with the necessary skills and know-how including working, design (including modeling), fabrication and deployment of MEMS and NEMS based sensors and actuators in various technology domains. The aim is also to unleash the excitement related to future developments in MEMS and NEMS related to diverse fields. The target audience comprise of Masters Students in the disciplines of: (a) Materials Science and Engineering, (b) Mechatronics and (c) Nanoscience and Technology. Considering the diverse backgrounds, the prerequisites for the course have been kept to include only basic engineering skills and an enthusiasm to participate in the journey of learning.
[Video Demos, Matlab Codes, PH515 survival kit, etc :-)]
NOTE: Office contact hours for PH515 is as
follows:
Friday 09:00-10:00
instructors
This course is being taught jointly by:
Dr. Ajay D. Thakur (ajay.thakur[at]iitp.ac.in) and Dr. Jayakumar Balakrishnan (jayakumar.b[at]iitp.ac.in).
handouts
COURSE GOALS
There is a twofold aim of the
course:
-
(a) Convey and demonstrate the concepts working behind
MEMS and NEMS, and
(b) Elaborate the underlying design
principles and equip the students with key skills.
As a potential MEMS/NEMS engineer, this will equip
you
to:
(a) logically understand the basic ingredients of the MEMS/NEMS design problem(s) at hand,
(b) plan flow of fabrication steps and coherently write the 'process steps',
(c) apply 'design of experiment' (DoE) approach for MEMS/NEMS fabrication, and
(c) model MEMS/NEMS and interpret results.
Textbooks/References
1.
1. Electromechanical
Sensors and Actuators, Ilene J. Busch-Vishniac, Springer, 2008.
2.
2. A
(not so) short introduction to MEMS, Frank Chollet and Haobing Liu. [link]
3.
3. Introduction
to Microelectronics Fabrication, Vol. V, G. W. Neudeck and R. F.
Pierret
(eds.), Addison – Wesley, 1988.
4. Introduction
to Microelectromechanical Microwave Systems, H. J. De Loss Santos, 2nd
edition,
5.
5.
Microsystems
Design, S. D. Senturia, Kluwer – Academic Publishers, Boston MA,
2001.
6.
6.
Principles
and Applications of Nano-MEMS Physics, H. J. Delos Santos, Springer,
2008. [link]
7.
7. Materials
and Process Integration for MEMS Microsystems, Vol. 9, Francis E. H.
Tay,
Springer, 2002.